Kalrez® Semiconductor Industry
Kalrez® perfluoroelastomer (FFKM) parts withstand attacks from more than 1,800 chemicals, solvents and plasmas and delivers outstanding performance in aggresive process environments.
Kalrez® perfluoroelastomer (FFKM) parts withstand attacks from more than 1,800 chemicals, solvents and plasmas and delivers outstanding performance in aggresive process environments.
An amber translucent product targeted specifically for deposition process applications, i.e. HDPCVD, PECVD, SACVD, Metal CVD, ALD, etc.
data sheetA brown product for all etch processes. It has been specifically designed for use in applications where the plasma environment is a combination of ions and radicals.
data sheetA tan product targeted specifically for deposition processes where ozone is used for processing. It has been specifically designed for use in applications where the plasma environment is more “chemical”.
data sheetA clear, transparent product targeted for “select” plasma process applications, i.e. deposition, etching, ashing/stripping.
data sheetA beige, general purpose product for etching, ashing/stripping and deposition process applications, i.e. HDPCVD, PECVD, and SACVD.
data sheetA black product that has been specifically developed for semiconductor thermal processes, i.e. oxidation, diffusion furnace, metal CVD, ALD, and LPCVD.
data sheetA white product specifically developed to meet the challenging requirements associated with sealing applications in semiconductor thermal processes, i.e. oxidation, diffusion, furnace, LPCVD, RTP and lamp anneal.
data sheetA white product for "select" etch, ash/strip and deposition process applications. It offers very low weight loss in oxygen and fluorine-based plasmas, low outgassing, and excellent elastic recovery properties.
data sheetperfluoroelastomer parts are primarily designed for seal locations in the direct path of high energy ultraviolet (UV) radiation emitted from a conventional light source or from plasma
data sheetperfluoroelastomer parts are designed for high purity, high temperature vacuum applications where seals are exposed to damaging Fluorine and Oxygen plasma radicals.
data sheetperfluoroelastomer parts are a black product targeted specifically metal CVD applications. It offers outstanding thermal stability, very low outgassing and excellent compression set properties.
data sheetperfluoroelastomer parts are a black product for photovoltaic wet manufacturing processes requiring a wide range of chemical resistance.
data sheetperfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years.
data sheetperfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years.
data sheetperfl uoroelastomer parts have been used successfully in highly aggressive sealing environments for over 40 years.
data sheetBay Seal Company is committed to provide the highest quality
sealing and gasket solutions.