Kalrez® Semiconductor Industry
Kalrez® perfluoroelastomer (FFKM) parts withstand attacks from more than 1,800 chemicals, solvents and plasmas and delivers outstanding performance in aggresive process environments.
The suggested products for the Semiconductor Industry are:
Kalrez® 9100
An amber translucent product targeted specifically for deposition process applications, i.e. HDPCVD, PECVD, SACVD, Metal CVD, ALD, etc.
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Temperature Range
25–180 °C
Kalrez® 9300
A brown product for all etch processes. It has been specifically designed for use in applications where the plasma environment is a combination of ions and radicals.
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Temperature Range
25–200 °C
Kalrez® 9500
A tan product targeted specifically for deposition processes where ozone is used for processing. It has been specifically designed for use in applications where the plasma environment is more “chemical”.
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Temperature Range
25–250 °C
Kalrez® 8002
A clear, transparent product targeted for “select” plasma process applications, i.e. deposition, etching, ashing/stripping.
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Temperature Range
25–250 °C
Kalrez® Sahara ™ 8085
A beige, general purpose product for etching, ashing/stripping and deposition process applications, i.e. HDPCVD, PECVD, and SACVD.
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Temperature Range
25–250 °C
Kalrez® 8900
A black product that has been specifically developed for semiconductor thermal processes, i.e. oxidation, diffusion furnace, metal CVD, ALD, and LPCVD.
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Temperature Range
25–250 °C
Kalrez® Sahara™ 8475
A white product specifically developed to meet the challenging requirements associated with sealing applications in semiconductor thermal processes, i.e. oxidation, diffusion, furnace, LPCVD, RTP and lamp anneal.
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Temperature Range
150–300 °C
Kalrez® 8575
A white product for "select" etch, ash/strip and deposition process applications. It offers very low weight loss in oxygen and fluorine-based plasmas, low outgassing, and excellent elastic recovery properties.
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Temperature Range
150–300 °C
Kalrez® 8705
perfluoroelastomer parts are primarily designed for seal locations in the direct path of high energy ultraviolet (UV) radiation emitted from a conventional light source or from plasma
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Temperature Range
310°C 590°F
Kalrez®9600
perfluoroelastomer parts are designed for high purity, high temperature vacuum applications where seals are exposed to damaging Fluorine and Oxygen plasma radicals.
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Temperature Range
315°C 600°F
Kalrez®7075UP
perfluoroelastomer parts are a black product targeted specifically metal CVD applications. It offers outstanding thermal stability, very low outgassing and excellent compression set properties.
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Temperature Range
327°C 620°F
Kalrez®W240
perfluoroelastomer parts are a black product for photovoltaic wet manufacturing processes requiring a wide range of chemical resistance.
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Temperature Range
230 °C
Kalrez® Plasma Processes
perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years.
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Temperature Range
250 °C - 300 °C
Kalrez® Thermal Processes
perfluoroelastomer parts have been used successfully in highly aggressive sealing environments for more than 40 years.
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Temperature Range
200 °C - 300 °C
Kalrez® Wet Processes
perfl uoroelastomer parts have been used successfully in highly aggressive sealing environments for over 40 years.
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Temperature Range
70 °C - 125 °C