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  Kalrez®
Bay Seal company Semiconductor Industry
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  Custom Molded Shapes
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  Spring Energized (PTFE) Seals
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Kalrez® Semiconductor Industry

Semiconductor Industry Kalrez® perfluoroelastomer (FFKM) parts withstand attacks from more than 1,800 chemicals, solvents and plasmas and delivers outstanding performance in aggresive process environments.
The suggested products for the Semiconductor Industry are:
Kalrez® 9100 – An amber translucent product targeted specifically for deposition process applications, i.e. HDPCVD, PECVD, SACVD, Metal CVD, ALD, etc.

Kalrez® 9300 – A brown product for all etch processes. It has been specifically designed for use in applications where the plasma environment is a combination of ions and radicals.

Kalrez® 9500 – A tan product targeted specifically for deposition processes where ozone is used for processing. It has been specifically designed for use in applications where the plasma environment is more “chemical”.

Kalrez® 8002 – A clear, transparent product targeted for “select” plasma process applications, i.e. deposition, etching, ashing/stripping.

Kalrez® Sahara ™ 8085 – A beige, general purpose product for etching, ashing/stripping and deposition process applications, i.e. HDPCVD, PECVD, and SACVD.

Kalrez® 8900
– A black product that has been specifically developed for semiconductor thermal processes, i.e. oxidation, diffusion furnace, metal CVD, ALD, and LPCVD.

Kalrez® Sahara™ 8475 – A white product specifically developed to meet the challenging requirements associated with sealing applications in semiconductor thermal processes, i.e. oxidation, diffusion, furnace, LPCVD, RTP and lamp anneal.

Kalrez 8575 - A white product for "select" etch, ash/strip and deposition process applications. It offers very low weight loss in oxygen and fluorine-based plasmas, low outgassing, and excellent elastic recovery properties.

Kalrez® 6375UP – A black product for wet process applications. This product exhibits excellent chemical resistance to all types of wet process chemicals, acids and bases.

Kalrez® Bonded Door Seals – Available in 9100, 8002 and Sahara® 8085, these seals significantly improve both particle generation and sealing performance over conventional o-rings for etching, ashing/stripping, HDPCVD, PECVD, SACVD, Metal CVD, and ALD wafer processing applications.