Kalrez® is supplied in standard O-rings or custom shapes and resists over 1,800 different chemicals while offering high temperature stability up to 327C. Kalrez® is used in semiconductor wafer processing, chemical processing, pharmaceutical, oil and gas and aerospace applications.
Kalrez® Products include:
- Kalrez® 9100 – An amber translucent product targeted specifically for deposition process applications, i.e. HDPCVD, PECVD, SACVD, Metal CVD, ALD, etc.
- Kalrez® 8085 – A beige, general purpose product for all plasma process applications, i.e. etching, ashing/stripping, HDPCVD, PECVD, SACVD, etc.
- Kalrez® 8575 – A white product for deposition process applications, “select” etching, and ashing/stripping. It is well suited for both static and dynamic sealing.
- Kalrez® 8002 – A clear, transparent product targeted for “select” plasma process applications, i.e. deposition, etching, ashing/stripping.
- Kalrez® 7075UP – A black product developed for semiconductor oxidation, diffusion furnace and thermal process applications. It offers outstanding thermal stability, up to 327C and excellent compression set properties.
- Kalrez® 6375UP – A black product for wet process applications. This product exhibits excellent chemical resistance to all types of chemicals, acids and bases.
To access Data Sheets for a Kalrez® product, go to the Technical Documentation.
To go to the Kalrez website click here.
For additional information or assistance please click here or call Bay Seal at 1-800-273-7325.
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